Original Assignee Applied Materials Inc Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Pending Application number US17/163,066 Inventor Vladimir Nagorny Current Assignee (The listed assignees may be inaccurate. Google Patents US20220246409A1 - Image-based digital control of plasma processing
US20220246409A1 - Image-based digital control of plasma processing
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